Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range

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Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range
oleh Gnter Wilkening, Ludger Koenders
Rp 3.418.000      
The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. ...  
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